Vandervorst, WilfriedWilfriedVandervorstEyben, PierrePierreEybenSchulze, AndreasAndreasSchulzeMody, JayJayModyKoelling, SebastianSebastianKoellingKambham, Ajay KumarAjay KumarKambhamGilbert, MatthieuMatthieuGilbert2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18223Dopant/carrier profiling in nanostructuresProceedings paper