Sources of overlay error in double patterning integration schemes

Laidler, DavidDavidLaidlerLeray, PhilippePhilippeLerayD'have, KoenKoenD'haveCheng, ShauneeShauneeCheng2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13976Sources of overlay error in double patterning integration schemesProceedings paper