Setting up a proper power spectral density (PSD) and autocorrelation analysis for material and process characterization

Rutigliani, VitoVitoRutiglianiLorusso, GianGianLorussoDe Simone, DaniloDaniloDe SimoneLazzarino, FredericFredericLazzarinoRispens, GijsbertGijsbertRispensPapavieros, GeorgeGeorgePapavierosGogolides, EvangelosEvangelosGogolidesCostantoudis, VassiliosVassiliosCostantoudisMack, ChrisChrisMack2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31693Setting up a proper power spectral density (PSD) and autocorrelation analysis for material and process characterizationProceedings paperhttps://doi.org/10.1117/12.2297264