Vanstreels, KrisKrisVanstreelsZahedmanesh, HoumanHoumanZahedmaneshGonzalez, MarioMarioGonzalez2021-11-262021-11-022021-11-2620200026-2714WOS:000601148900013https://imec-publications.be/handle/20.500.12860/38310Mechanical stability of airgaps in nano-interconnectsJournal article10.1016/j.microrel.2020.113597WOS:000601148900013FRACTURE ENERGYINTEGRITYFILMS