Nucleation and growth of copper on Ru-Based Substrates: I. The effect of the inorganic components

Nagar, MagiMagiNagarVereecken, PhilippePhilippeVereeckenStrubbe, KatrienKatrienStrubbeRadisic, AlexAlexRadisic2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21187Nucleation and growth of copper on Ru-Based Substrates: I. The effect of the inorganic componentsProceedings paper