Vereecke, GuyGuyVereeckeHolsteyns, FrankFrankHolsteynsVeltens, TomTomVeltensLux, MarcelMarcelLuxArnauts, SophiaSophiaArnautsKenis, KarineKarineKenisVos, RitaRitaVosMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9860Evaluation of megasonic cleaning systems for particle removal efficiency and damagingProceedings paper