Marcon, DenisDenisMarconDe Jaeger, BriceBriceDe JaegerHalder, SandipSandipHalderVranckx, NickNickVranckxMannaert, GeertGeertMannaertVan Hove, MarleenMarleenVan HoveDecoutere, StefaanStefaanDecoutere2021-10-212021-10-2120130894-6507https://imec-publications.be/handle/20.500.12860/22759Manufacturing challenges of GaN-on-Si HEMTs in a 200 mm CMOS fabJournal article