Extraction of the appropriate material property for realistic modeling of through-silicon-vias using μ-raman spectroscopy

Okoro, ChukwudiChukwudiOkoroYang, YuYuYangVandevelde, BartBartVandeveldeSwinnen, BartBartSwinnenVandepitte, DirkDirkVandepitteVerlinden, BertBertVerlindenDe Wolf, IngridIngridDe Wolf2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14249Extraction of the appropriate material property for realistic modeling of through-silicon-vias using μ-raman spectroscopyProceedings paper