Linearized radially polarized light for improved precision in strain measurements using micro-Raman spectroscopy

Bals, S.S.BalsVerbeeck, J.J.VerbeeckPrabhakara, ViveksharmaViveksharmaPrabhakaraNuytten, ThomasThomasNuyttenBender, HugoHugoBenderVandervorst, WilfriedWilfriedVandervorst2021-12-062021-11-022021-12-0620211094-4087WOS:000708940500144https://imec-publications.be/handle/20.500.12860/37430Linearized radially polarized light for improved precision in strain measurements using micro-Raman spectroscopyJournal article10.1364/OE.434726WOS:000708940500144BEAMSTRESS