Focused-ion-beam fabrication of slots in silicon waveguides and ring resonators

Schrauwen, JonathanJonathanSchrauwenClaes, TomTomClaesVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-172021-10-172008-11https://imec-publications.be/handle/20.500.12860/14445Focused-ion-beam fabrication of slots in silicon waveguides and ring resonatorsProceedings paper