Fabrication of sub-micron self-aligned organic thin film transistors and circuits on 4" flexible substrates by Nanoimprint Lithography

Haase, AnjaAnjaHaaseGold, HerbertHerbertGoldFian, AlexanderAlexanderFianPrietl, ChristineChristinePrietlStadlober, BarbaraBarbaraStadloberSchindler, AxelAxelSchindlerDrost, AndreasAndreasDrostKoenig, MartinMartinKoenigMuller, RobertRobertMullerGenoe, JanJanGenoeMarjanovic, NenadNenadMarjanovicZanella, FredericFredericZanellaZschokke, ChristianChristianZschokkeRing, JohanJohanRingLee, Ki-DongKi-DongLeeHirshy, HassanHassanHirshyPretot, RogerRogerPretot2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22445Fabrication of sub-micron self-aligned organic thin film transistors and circuits on 4" flexible substrates by Nanoimprint LithographyOral presentationhttp://www.icoe2013.org/ICOE2013-TimeTableDaybyDayProgram-FinalVersion-June2013.pdf