On the temperature dependence of frequency dispersion in C-V measurements of III-V MOS devices and its application in spatial profiling of border traps

Vais, AbhitoshAbhitoshVaisLin, DennisDennisLinDou, ChunmengChunmengDouYuan, YuYuYuanMartens, KoenKoenMartensIvanov, TsvetanTsvetanIvanovCollaert, NadineNadineCollaertDe Meyer, KristinKristinDe MeyerThean, AaronAaronTheanTaur, YuanYuanTaur2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23216On the temperature dependence of frequency dispersion in C-V measurements of III-V MOS devices and its application in spatial profiling of border trapsMeeting abstract