Critical dimension metrology using Raman spectroscopy

Gawlik, AndrzejAndrzejGawlikBogdanowicz, JanuszJanuszBogdanowiczNuytten, ThomasThomasNuyttenCharley, Anne-LaureAnne-LaureCharleyTeugels, LieveLieveTeugelsMisiewicz, JanJanMisiewiczVandervorst, WilfriedWilfriedVandervorst2021-10-282021-10-2820200003-6951https://imec-publications.be/handle/20.500.12860/35160Critical dimension metrology using Raman spectroscopyJournal articlehttps://doi.org/10.1063/5.0013506