Bekaert, JoostJoostBekaertLaenens, BartBartLaenensVerhaegen, StafStafVerhaegenVan Look, LieveLieveVan LookTrivkovic, DarkoDarkoTrivkovicLazzarino, FredericFredericLazzarinoVandenberghe, GeertGeertVandenbergheVan Adrichem, PaulPaulVan AdrichemSocha, RobertRobertSochaHsu, StephenStephenHsuLiu, Hua YuHua YuLiuMouraille, OrionOrionMourailleSchreel, KoenKoenSchreelDusa, MirceaMirceaDusaZimmermann, JoergJoergZimmermannGräupner, PaulPaulGräupnerNeumann, Jens TimoJens TimoNeumann2021-10-192021-10-1920111537-1646https://imec-publications.be/handle/20.500.12860/18540Experimental verification of source-mask optimization and freeform illumination for 22 nm node SRAM cellsJournal article