Huang, Chih HsienChih HsienHuangGao, HangHangGaoHaouari, RachidRachidHaouariTroia, BenedettoBenedettoTroiaMao, ShengpingShengpingMaoJansen, RoelofRoelofJansenRochus, VeroniqueVeroniqueRochusRottenberg, XavierXavierRottenberg2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28544Frequency response and mode shape characterization for acoustic sensor in micro-opto-mechanical technologyProceedings paperhttp://ieeexplore.ieee.org/document/8092985/