An inner gate as enabler for vertical pitch scaling in macaroni channel gate-all-around 3-D NAND flash memory

Verreck, DevinDevinVerreckArreghini, AntonioAntonioArreghiniVan den Bosch, GeertGeertVan den BoschRosmeulen, MaartenMaartenRosmeulen2023-06-302023-01-232023-06-3020230038-1101WOS:000900139700007https://imec-publications.be/handle/20.500.12860/41017An inner gate as enabler for vertical pitch scaling in macaroni channel gate-all-around 3-D NAND flash memoryJournal article10.1016/j.sse.2022.108498WOS:000900139700007