Characterization of the local mechanical stress induced during the Ti and Co/Ti salicidation in sub-0.25μm technologies

Steegen, AnAnSteegenDe Wolf, IngridIngridDe WolfMaex, KarenKarenMaex2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3852Characterization of the local mechanical stress induced during the Ti and Co/Ti salicidation in sub-0.25μm technologiesJournal article