Detavernier, C.C.DetavernierVan Meirhaeghe, R. L.R. L.Van MeirhaegheCardon, F.F.CardonDonaton, R. A.R. A.DonatonMaex, KarenKarenMaex2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3416CoSi2 formation in the presence of interfacial silicon oxideJournal article