Favia, PaolaPaolaFaviaRichard, OlivierOlivierRichardGeypen, JefJefGeypenWaldron, NiamhNiamhWaldronMerckling, ClementClementMercklingGuo, WeimingWeimingGuoCaymax, MattyMattyCaymaxBender, HugoHugoBender2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22335Composition variation of In1-xGaxAs epitaxially grown in narrow trenches on SiProceedings paper