High refractive index fluid evaluations at 193 nm: Fluid lifetime and fluid/resist interaction studies

Tran, HVHVTranHendrickx, EricEricHendrickxFrench, RHRHFrenchAdelman, DJDJAdelmanRogado, NSNSRogadoKaku, MMKaku2021-10-172021-10-1720080914-9244https://imec-publications.be/handle/20.500.12860/14571High refractive index fluid evaluations at 193 nm: Fluid lifetime and fluid/resist interaction studiesJournal article