Wada, MasayukiMasayukiWadaVos, RitaRitaVosClaes, MartineMartineClaesSchram, TomTomSchramSnow, J.J.SnowMertens, PaulPaulMertensEitoku, A.A.Eitoku2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16515New wet process strategies for reduced La2O3 and MgO2 high-k cap-dielectric lossProceedings paper