Van Cauwenberghe, MarcMarcVan CauwenbergheMannaert, GeertGeertMannaertBoullart, WernerWernerBoullartHendrickx, DirkDirkHendrickxSchmidt, M.O.M.O.Schmidt2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9715Using a biased-ICP reactor for PR strip and Cu barrier removalJournal article