Rottenberg, XavierXavierRottenbergGeerlings, J.J.GeerlingsMertens, RobertRobertMertensNauwelaers, BartBartNauwelaersDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-152021-10-152003-10https://imec-publications.be/handle/20.500.12860/8092MEMS near-DC to RF capacitive series switchesProceedings paper