NANOWIRE & NANOSHEET FETS FOR ADVANCED ULTRA-SCALED, HIGH-DENSITY LOGIC AND MEMORY APPLICATIONS

Veloso, AnabelaAnabelaVelosoMatagne, PhilippePhilippeMatagneEneman, GeertGeertEnemanJang, DoyoungDoyoungJangHuynh-Bao, T.T.Huynh-BaoVaisman Chasin, AdrianAdrianVaisman ChasinSimoen, EddyEddySimoenDe Keersgieter, AnAnDe KeersgieterHoriguchi, NaotoNaotoHoriguchi2021-12-092021-11-022021-12-092020naWOS:000682768500101https://imec-publications.be/handle/20.500.12860/37620NANOWIRE & NANOSHEET FETS FOR ADVANCED ULTRA-SCALED, HIGH-DENSITY LOGIC AND MEMORY APPLICATIONSProceedings paper978-1-7281-6558-5WOS:000682768500101