Van Besien, ElsElsVan BesienSingh, ArjunArjunSinghBarbarin, YohanYohanBarbarinVerdonck, PatrickPatrickVerdonckDekkers, HaroldHaroldDekkersVanstreels, KrisKrisVanstreelsde Marneffe, Jean-FrancoisJean-Francoisde MarneffeBaklanov, MikhaïlMikhaïlBaklanovVan Elshocht, SvenSvenVan Elshocht2021-10-222021-10-2220140167-9317https://imec-publications.be/handle/20.500.12860/24660Low-k a-SiCO:H films as diffusion barriers for advanced interconnectsJournal articlehttp://www.sciencedirect.com/science/article/pii/S016793171300717X