Epitaxial Ge-on-nothing virtual substrates for 3D device stacking technologies

Loo, RogerRogerLooPorret, ClémentClémentPorretHan, HanHanHanDepauw, ValerieValerieDepauw2021-10-292021-10-292020-09https://imec-publications.be/handle/20.500.12860/35504Epitaxial Ge-on-nothing virtual substrates for 3D device stacking technologiesProceedings paperhttps://iopscience.iop.org/article/10.1149/09805.0195ecst/pdf