Vlcek, JanJanVlcekFendrych, FrantisekFrantisekFendrychTaylor, AndrewAndrewTaylorKratochvilova, IrenaIrenaKratochvilovaFekete, LadislavLadislavFeketeNesladek, MilosMilosNesladekLiehr, MichaelMichaelLiehr2021-10-192021-10-192010https://imec-publications.be/handle/20.500.12860/18312Novel concepts for low-pressure, low-temperature nanodiamond growth using MW-linear antenna plasma sourcesProceedings paper