Lindsay, RichardRichardLindsayPawlak, BartekBartekPawlakKittl, JorgeJorgeKittlHenson, KirklenKirklenHensonGiangrandi, SimoneSimoneGiangrandiDuffy, RayRayDuffySurdeanu, RaduRaduSurdeanuVandervorst, WilfriedWilfriedVandervorstPagès, XavierXavierPagèsVan der Jeugd, KeesKeesVan der JeugdStolk, P.P.StolkMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7806Leakage optimatisation of ultra-shallow junctions formed by solid phase epitaxial regrowth (SPER)Proceedings paper