Franco, JacopoJacopoFrancoKaczer, BenBenKaczerRoussel, PhilippePhilippeRousselMitard, JeromeJeromeMitardCho, Moon JuMoon JuChoWitters, LiesbethLiesbethWittersGrasser, TiborTiborGrasserGroeseneken, GuidoGuidoGroeseneken2021-10-212021-10-2120130018-9383https://imec-publications.be/handle/20.500.12860/22359SiGe channel technology: superior reliability toward ultra-thin EOT devices – Part I: NBTIJournal article