Test-station for flexible semi-automatic wafer-level silicon photonics testing

De Coster, JeroenJeroenDe CosterDe Heyn, PeterPeterDe HeynPantouvaki, MariannaMariannaPantouvakiSnyder, BradBradSnyderChen, HongtaoHongtaoChenMarinissen, Erik JanErik JanMarinissenAbsil, PhilippePhilippeAbsilVan Campenhout, JorisJorisVan CampenhoutBolt, BryanBryanBolt2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26492Test-station for flexible semi-automatic wafer-level silicon photonics testingProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7519306