Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach

Zotovich, AlexeyAlexeyZotovichRezvanov, AskarAskarRezvanovChanson, RomainRomainChansonZhang, L.L.ZhangHacker, N.N.HackerKurchikov, K.K.KurchikovKlimin, S.S.KliminZyryanov, S. M.S. M.ZyryanovLopaev, DimitriDimitriLopaevGornev, E.E.GornevClemente, I.I.ClementeMiakonkikh, A.A.MiakonkikhMaslakov, K.K.Maslakov2021-10-262021-10-2620180022-3727https://imec-publications.be/handle/20.500.12860/32390Low-k protection from F radicals and VUV photons using a multilayer pore grafting approachJournal articlehttp://iopscience.iop.org/article/10.1088/1361-6463/aad06d