Dense lines created by spacer DPT scheme: process control by local dose adjustment using advanced scanner control

Finders, JoJoFindersDusa, MirceaMirceaDusaVleeming, BertBertVleemingFliervoet, TimonTimonFliervoetHepp, BirgittBirgittHeppMegens, henryhenryMegensGroenendijk, RemcoRemcoGroenendijkQuaedackers, JohnJohnQuaedackersMos, EvertEvertMosLeewis, ChristianChristianLeewisBornebroek, FrankFrankBornebroekMaenhoudt, MireilleMireilleMaenhoudtLeblans, MarcMarcLeblansVandeweyer, TomTomVandeweyerMurdoch, GayleGayleMurdochAltamirano Sanchez, EfrainEfrainAltamirano Sanchez2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15309Dense lines created by spacer DPT scheme: process control by local dose adjustment using advanced scanner controlProceedings paperhttp://spiedl.aip.org/