Wang, BoBoWangDe Coster, JeroenJeroenDe CosterDe Wolf, IngridIngridDe WolfWevers, MartineMartineWevers2021-10-212021-10-2120130026-2714https://imec-publications.be/handle/20.500.12860/23371A novel method to measure the internal pressure of MEMS thin-film packagesJournal articlehttp://www.sciencedirect.com/science/article/pii/S0026271413002746