Naem, AbdallaAbdallaNaemLauwers, A.A.Lauwersde Potter de ten Broeck, MurielMurielde Potter de ten BroeckMaex, KarenKarenMaex2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2046Effect of implantation oxide on the silicidation of narrow diffused and poly-linesOral presentation