Enhanced Spectral Tunability by Sub-10 nm Nanogaps in Graphene-Metal Hybrid Metasurfaces

Han, FeiFeiHanLin, ZaoyangZaoyangLinPilarczyk, KacperKacperPilarczykTang, HongweiHongweiTangVandenbosch, Guy A. E.Guy A. E.VandenboschVan de Vondel, JorisJorisVan de VondelZheng, XuezhiXuezhiZhengVerellen, NielsNielsVerellenJanssens, EwaldEwaldJanssens2025-08-102025-08-102025-JUL 32198-3844WOS:001540342100001https://imec-publications.be/handle/20.500.12860/46049Enhanced Spectral Tunability by Sub-10 nm Nanogaps in Graphene-Metal Hybrid MetasurfacesJournal article10.1002/advs.202506898WOS:001540342100001LIGHT-MATTER INTERACTIONSATOMIC LAYER DEPOSITIONALL-OPTICAL MODULATIONRAMAN-SPECTROSCOPYELECTRON-BEAMLITHOGRAPHYMETAMATERIALSFABRICATIONABSORPTIONPLASMONICSMEDLINE:40739306