Wrinkled B-NCD pressure sensing membranes: a mismatch in thermal expension coefficients dertermines the sensitivity

Drijkoningen, SienSienDrijkoningenJanssens, Stoffel D.Stoffel D.JanssensHaenen, KenKenHaenen2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25226Wrinkled B-NCD pressure sensing membranes: a mismatch in thermal expension coefficients dertermines the sensitivityOral presentation