Zahid, MohammedMohammedZahidPantisano, LuigiLuigiPantisanoDegraeve, RobinRobinDegraeveAoulaiche, MarcMarcAoulaicheTrojman, LionelLionelTrojmanFerain, IsabelleIsabelleFerainsan andres, eesan andresShickova, AdelinaAdelinaShickovaO'Connor, RobertRobertO'ConnorGroeseneken, GuidoGuidoGroesenekenHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe Gendt2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14829Trapping in 1nm EOT high-k / MGProceedings paper