Bogdanowicz, JanuszJanuszBogdanowiczMingardi, AndreaAndreaMingardiBrissonneau, VincentVincentBrissonneauLoo, RogerRogerLooShimura, YosukeYosukeShimuraAkula, AnjaniAnjaniAkulaPuttarame Gowda, PallaviPallaviPuttarame GowdaZhou, DaisyDaisyZhouHoriguchi, NaotoNaotoHoriguchiBiesemans, SergeSergeBiesemansKuhn, M.M.KuhnMurakami, S.S.MurakamiIto, Y.Y.ItoHiguchi, A.A.HiguchiLeray, PhilippePhilippeLerayCharley, Anne-LaureAnne-LaureCharley2025-07-282025-07-282025978-1-5106-8638-00277-786XWOS:001514426300043https://imec-publications.be/handle/20.500.12860/45953Inline X-ray metrology for Complementary Field-Effect Transistors (CFET)Proceedings paper10.1117/12.3050810978-1-5106-8639-7WOS:001514426300043