Jin, SingSingJinBender, HugoHugoBenderWu, Ming FangMing FangWuVantomme, AndreAndreVantommeLangouche, G.G.Langouche2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4457Formation of (Nd,Y)-silicides by sequential channeled implantation of Y and Nd ionsJournal article