Strain analysis of Si1-xGex embedded source/drain transistors by nano-beam diffraction

Favia, PaolaPaolaFaviaBargallo Gonzalez, MireiaMireiaBargallo GonzalezSimoen, EddyEddySimoenVerheyen, PeterPeterVerheyenBender, HugoHugoBender2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15298Strain analysis of Si1-xGex embedded source/drain transistors by nano-beam diffractionMeeting abstract