Dupuy, EmmanuelEmmanuelDupuyCapogreco, ElenaElenaCapogrecoDentoni Litta, EugenioEugenioDentoni LittaTao, ZhengZhengTaoSebaai, FaridFaridSebaaiSpessot, AlessioAlessioSpessotHoriguchi, NaotoNaotoHoriguchi2024-01-162023-01-092024-01-162022-09-20https://imec-publications.be/handle/20.500.12860/40955Gate-First High-k/Metal Gate FinFET for advanced DRAM peripheral transistorsOral presentationElectrical & electronic engineeringGate, Etch, HKMG, Gate-first