Mechanical and electrical characterization of BCB as a bond&seal material for cavities housing (RF-)MEMS devices

Jourdain, AnneAnneJourdainDe Moor, PietPietDe MoorTilmans, HarrieHarrieTilmans2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9103Mechanical and electrical characterization of BCB as a bond&seal material for cavities housing (RF-)MEMS devicesProceedings paper