Short course FEOL reliability: BTI and TDDB in high k/metal gate, FinFET and Ge-based technologies

Kaczer, BenBenKaczer2021-10-182021-10-182010-12https://imec-publications.be/handle/20.500.12860/17334Short course FEOL reliability: BTI and TDDB in high k/metal gate, FinFET and Ge-based technologiesProceedings paper