El Gannudi, HamzaHamzaEl GannudiCherman, VladimirVladimirChermanFarinelli, PaolaPaolaFarinelliPham, NgaNgaPhamBogaerts, LieveLieveBogaertsTilmans, HarrieHarrieTilmansSorrentino, RobertoRobertoSorrentino2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18869Design of RF feedthroughs in Zero-level packaging for RF MEMS implementing TSVsProceedings paper