CAD-oriented semi analytic approach for capacitance matrix computation of multilayer VLSI interconnects

Ymeri, HasanHasanYmeriNauwelaers, BartBartNauwelaersMaex, KarenKarenMaex2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7082CAD-oriented semi analytic approach for capacitance matrix computation of multilayer VLSI interconnectsJournal article