Stress induced densification of thin porous low-k films during nanoindentation

Okudur, Oguzhan OrkutOguzhan OrkutOkudurRedzheb, MuradMuradRedzhebVanstreels, KrisKrisVanstreelsZahedmanesh, HoumanHoumanZahedmaneshGonzalez, MarioMarioGonzalezDe Wolf, IngridIngridDe Wolf2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31445Stress induced densification of thin porous low-k films during nanoindentationProceedings paperhttps://ieeexplore.ieee.org/document/8430466/