RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys

De Coster, WalterWalterDe CosterBrijs, BertBertBrijsBender, HugoHugoBenderAlay, Josep LluisJosep LluisAlayVandervorst, WilfriedWilfriedVandervorst2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/103RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloysJournal article