Gianni, Giai GischiaGiai GischiaGianniCroes, KristofKristofCroesGroeseneken, GuidoGuidoGroesenekenTokei, ZsoltZsoltTokeiAfanasiev, ValeriValeriAfanasievZhao, LarryLarryZhao2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17146Study of leakage mechanism and trap density in porous low-k materialsProceedings paper