Performance assessment of (110) p-FET high-k/MG: is it mobility or series resistance limited?

Trojman, LionelLionelTrojmanPantisano, LuigiLuigiPantisanoSeveri, SimoneSimoneSeveriSan Andres Serrano, EnriqueEnriqueSan Andres SerranoHoffmann, Thomas Y.Thomas Y.HoffmannFerain, IsabelleIsabelleFerainDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsMaes, HermanHermanMaesGroeseneken, GuidoGuidoGroeseneken2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12994Performance assessment of (110) p-FET high-k/MG: is it mobility or series resistance limited?Journal article