Fyen, WimWimFyenHolsteyns, FrankFrankHolsteynsBearda, TwanTwanBeardaArnauts, SophiaSophiaArnautsVan Steenbergen, JanJanVan SteenbergenDoumen, GeertGeertDoumenKenis, KarineKarineKenisMertens, PaulPaulMertens2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8933A detailed study of semiconductor wafer dryingOral presentation